Polymeric Micropillars
Removal of Particulate Contamination by Microfibrils
Existing dry dust decontamination techniques are limited to +10 micron particles. Smaller particles can only be removed by techniques that are partially destructive to the substrate and involve cumbersome batch processing treatments. As a result Quality Assurance in cleanrooms and other critical environments is time consuming and affects product yield.
Microfibril technology is a zero-adhesion contact surface that collects impurities and contaminant particles with no damage to substrate features.
- Nondestructive over a full range of surface topologies
- May be designed to a specific cutoff Particle Size Distribution
- Removes 10micron to 100nm particles
- Uptake 10-20 monolayers per surface area.
- Compatible with any surface or contaminant.
- Water or electrostatic cleanable
- Injection molded PDMS roller prototype