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Polymeric Micropillars

Polymeric Micropillars

Removal of Particulate Contamination by Microfibrils

Existing dry dust decontamination techniques are limited to +10 micron particles. Smaller particles can only be removed by techniques that are partially destructive to the substrate and involve cumbersome batch processing treatments. As a result Quality Assurance in cleanrooms and other critical environments is time consuming and affects product yield.

Microfibril technology is a zero-adhesion contact surface that collects impurities and contaminant particles with no damage to substrate features.

  • Nondestructive over a full range of surface topologies
  • May be designed to a specific cutoff Particle Size Distribution
  • Removes 10micron to 100nm particles
  • Uptake 10-20 monolayers per surface area.
  • Compatible with any surface or contaminant.
  • Water or electrostatic cleanable
  • Injection molded PDMS roller prototype